テトラカルボン酸二無水物
1,2,3,4-シクロブタンテトラカルボン酸二無水物はメタクリル酸誘導体と反応させることで光応答性ポリマーが得られます。このポリマーは400 nmで85%の高い透過率,70%の高い平坦度を持っており,光照射によるパターン形成後,加熱することで脱水反応が進行し,ポリイミドを得ることができます。得られたポリイミドは薄膜トランジスタの材料として充分に利用可能なものであることが報告されています。
S. M. Choi, K. J. Kim, K.-Y. Choi, M. H. Yi, J. Appl. Polym. Sci. 2005, 96, 2300. DOI: 10.1002/app.21288
A series of negative-type photosensitive polyamic acids (PAAs) with various molecular weights was synthesized from cyclobutane-1,2,3,4-tetracarboxylic dianhydride, 2-(methacryloyloxy)ethyl-3,5-diaminobenzoate, and 2-(methacryloyloxy)ethyl-4-aminobenzoate in N-methyl-2-pyrrolidone. We investigated the degree of planarity, transmittance, and thermal stability for the PAAs after the photoirradiation reaction at an exposure dose of 200 mJ/cm2. The films prepared from the PAA with the lowest molecular weight (PAA-1) exhibited a higher degree of planarity and transmittance compared with those of the film prepared from the PAA with the highest molecular weight (PAA-4). The initial decomposition temperatures of the cured PAAs with different molecular weights were similar and were stable up to around 300°C. Further, the photosensitivity and transmittance of PAA-1 were investigated in the presence of photoinitiators at 365–400 nm with a high-pressure mercury lamp. The resolution of the photocured film was about 50 μm. © 2005 Wiley Periodicals, Inc. J Appl Polym Sci 96: 2300–2308, 2005